Totowa, NJ - Feb 2, 2012 - ECI Technology announced qualification of its newest product, Quali-Surf® QSF-500 series Wet Process Analyzer, at major facilities in Japan and Taiwan.
“The Quali-Surf QSF-500 was created to fill a need in the Semiconductor industry” said Marianna Rabinovitch, ECI Technology CEO. “Manufacturers worldwide approached ECI looking for a way to control Silicon Nitride Etch. The process uses materials that are notoriously difficult to maintain in spec. They came to us because they know of our deep experience with finding novel chemical analysis solutions to challenging problems. This product, for the first time, makes accurate analysis and control of this process possible.”
The Silicon Nitride Etch process uses hot Phosphoric acid solutions. The high temperature of the chemistry makes for a unique set of challenges in controlling the etch rate and selectivity of the process. The QSF-500 is able to overcome these hurdles with a patented design, providing fast and accurate results in the 0-100ppm range. Integrating the Quali-Surf analyzer with wet processing stations allows the user to control etch rate and selectivity, and eliminates common process pitfalls, such as over-etch or under-etch.