PERR Clean

The QUALI-SURF QSF-200 control system is a fully automated chemical process control system designed to support Post Etch Residue Removal (PERR), W Contact, TiN Hard Mask Removal, and AlOx/HMO Cleans. Get better utilization of your existing equipment by connecting QUALI-SURF to multiple tools and chemistries!
  • Supports Multiple Chemistries and Process Tools
  • Modular Design for Ultimate Flexibility
  • Precise Control of the Most Demanding Specs
  • Customized Metrology Proprietary Applications
  • Maximizes Up-Time and Reliability
  • Monitors Impact of Incoming Raw Material Variations
  • Analyzer Health Monitor Keeps Track of System Performance
  • Controls Advanced Cleaning Chemistries with Multiple Species
  • Rapid Conversion from R&D to HVM
  • Maintains Process Control Using Advanced SPC Capabilities
  • The Lowest CoO with the Highest Operational Convenience
  • Enables Chemical Vendors to Provide Metrology for Their Chemistries
  • Option - Benchtop analyzer for labs

Product downloads