QUALI-FILL LIBRA "K" Series

Built upon the proven QUALI-FILL Chemical Management System, LIBRA "K" Series incorporated the latest technologies in delivering fully automated online chemical metrology and smart dosing capabilities to TSV and WLP applications.

QUALI-FILL LIBRA "K" Series systems target the needs of advanced packaging with a suprior analytical performance at a significantly reduced cost-of-ownership. LIBRA "K" Series systems feature a modular design for analyzing TSV, RDL, Pillar, Bump, and UBM processes.

LIBRA "K" Series features a new Automatic Standard Generator (ASG) and Analyzer Health Monitor (AHM) enable self monitoring and alerts for PM and parts replacements when necessary. LIBRA is designed to provide a level of autonomous control with maximized reliability and up-time, giving customers the best ease of use and performance.

Product downloads